| 摘要 |
PURPOSE:To improve mass productivity by adhering a metallic surface which is deposited by evaporation on the surface of a pyroelectric wafer on a supporting base, polishing the top surface of the wafer, depositing a metallic film by evaporation thereon and dividing the wafer together with the base to pellet units. CONSTITUTION:The metallic film 2 is deposited by evaporation on one surface of the wafer 1 and the metallic film 2 is adhered by an adhesive agent 4 to the supporting base 3. The top surface of the wafer 1 is polished to a prescribed thickness and the metallic film 5 is formed by vapor deposition thereon. The wafer 1 consists of a lithium tantalate crystal. Said crystal having 200-300mum thickness is polished to 150-200mum. Quartz having 1mm thickness is used for the base 3 and conductive silver paste is used for the adhesive agent 4. The wafer 1 is then heated together with the base 3 to 150-180 deg.C to cure and after the wafer is divided to the pelelt units, gold wires 8, 9 are adhered to the side faces of the film 5' deposited by evaporation on the top surface and the film 4' deposited by evaporation on the bottom surface by conductive adhesive agents 6, 7. The decrease in the yield is thus prevented and mass productivity is improved. |
