| 摘要 |
PURPOSE:To utilize the instability of the surface of a magnetic fluid to produce discharge plasma by supplying the magnetic fluid to the end of one of the electrodes and using a magnetic field generator to control the magnetic field. CONSTITUTION:In an X-ray generator for pattern transcription, a high voltage source 1 is used to charge a capacitor 2 and to generate electric discharge between electrodes 3 and 4 thereby producing discharge plasma and achieving X-ray radiation. A magnetic fluid 7 is supplied from a case 8 into the small hole 3a of the electrode 3. A magnetic field generator 9 consisting of a magnet 9a and a coil 9b wound around the magnet 9a, is installed around the electrode 3. The magnetic field of the magnet 9a causes the magnetic fluid 7 to be held in the small hole 3a. During the production of discharge plasma, a current is fed through the coil 9b to remove part of the magnetic field of the magnet 9a thereby causing the magnetic fluid 7 to spout out from the small hole 3a and producing electric discharge by the spouting magnetic fluid 7. Consequently, it is possible to perform stable X-ray radiation. |
