| 摘要 |
PURPOSE:To enable high quality and high speed treatment, by providing a means for generating a rotary magnetic field along the surface of an electrode and a means for limiting or prohibiting the motion of the electron moving around the electrode. CONSTITUTION:An article 102 to be treated is placed on a non-earthed electrode 101, of which the entire surface is covered with an insulator 103 made of a fluorocarbon resin, within an earthed metal vacuum container 100. High frequency power is applied between the vacuum container 100 and the electrode 101 from a power source 125 and, at the same time, a three-phase AC current is flowed to the coils 104, 105, 106 provided to the outside of the vacuum container 100 from a power source 127 and a rotary magnetic field B parallel to the flat surface of the electrode 101 is formed. As a result, an electron is inhibited from a turn-around dummy cycloid motion around the electrode 101 by the side surface of the insulator 103 and the inner wall of the vacuum container 100 but rotated in the direction of the magnetic field B and high density plasma is generated in the vicinity of the flat surface part of the electrode 101. |
