| 摘要 |
PURPOSE:To enable a device to absorb self-induced vibration of a pneumatic bearing, by mounting a shock absorbing plate of rough surface accuracy to at least either one of the bearing pad side of a movable unit or the side opposite to the bearing. CONSTITUTION:A movable stage 25 is mounted onto a mounting plate 27 through a shock absorbing plate 1 of rough surface accuracy. If a device provides as described the plate 1 of ferrite board or the like to be interposed between the mounting plate 27 and the movable stage 25, the device inevitably forms an air layer 2, 2 respectively between the plate 1 and the movable stage 25 and between the plate 1 and the mounting plate 27. Accordingly, the device, enabling a self-induced vibration to be absorbed by said air layer 2, can promote a pneumatic hammer to damp and nullify its vibration. As the result, the device, in which a gap (g) between a surface plate 21 and a bearing pad 26 can be decreased to a fine value, enables the high rigidity to be obtained in a pneumatic bearing. |
