| 摘要 |
PURPOSE:To improve the life of gas and the stabilization of laser output and to prevent the damage of a total reflection mirror and a partial reflection mirror. CONSTITUTION:The shaft 25 of the rotor 18 of a Root's blower 8 is driven by a motor 22, and the timing-gear 14 is installed on the opposite end of the shaft 25 to the motor 22. A dust filter 23 is installed in a part of a conduit 26 which connects a timing-gear chamber 13 and the near part of the inlet 22 of the Root's blower 8 in a closed circuit. The dust filter 23 removes mist, vapour or corpuscles in the lubricating oil 15. While working, the gas pressure is lowest near the inlet, so the mist in the lubricating oil 15 in the timing-gear chamber 13 flows together with the laser medium gas towards the conduit 26. The mist and vapour, etc. in the lubricating oil 15 flowing in the conduit 26 are all captured by the dust filter 23 and only the laser medium gas circulate in the closed circuit. |
