| 摘要 |
PURPOSE:To use repeatedly a master disk and to make possible the production of plural pieces of stampers by coating a thin metallic film on a resist master disk then subjecting the same to an oxidation treatment to form a protective film and forming an electrode film and electroforming plating thereon thereby forming the stamper. CONSTITUTION:A resist film 2 and pregrooves 3 etched from said film are formed on a glass substrate 1 by the conventional practice. The thin metallic film 8 of Ni, etc. is formed by a vacuum deposition method, etc. on such master disk and is subjected to plasma oxidation by using a plasma device to convert the film 8 to a protective film 9, by which the groove master disk 10 is obtd. An electrode film 4 is formed thereon as a cathode and after a plating film 5 is formed thereon, said layer is stripped film the substrate 1 and a stamper 6 is formed. Since the protective film 9 is formed in such a manner, there is no exfoliation of the resist in the stage of stripping the plating layer 5 and the production of plural pieces of the stampers is made possible by using repeatedly the master disk 10. |
