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发明名称
SPUTTERING APPARATUS
摘要
申请公布号
US3583899(A)
申请公布日期
1971.06.08
申请号
USD3583899
申请日期
1968.12.18
申请人
NORTON CO.
发明人
ARNOLD J. ARONSON
分类号
C23C14/34;(IPC1-7):C23C15/00
主分类号
C23C14/34
代理机构
代理人
主权项
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