| 摘要 |
PURPOSE:To vary an insulating film during measuring operation and obtain versatile information by irradiating a sample insulating film with light for annealing while irradiating the film with light for measurement at a specific angle, and holding the film at specific temperature through a sample heating device. CONSTITUTION:The light from a measurement light source 1 is reflected by the surface of the sample 100 and enters a photodetector 7 through a rotary analyzer 6. The sample heating device 11 heats the sample 100 up to the specific temperature. The sample 100 is irradiated with annealing light from an annealing light source 10. The rotary analyzer 6 starts continuous operation after the same is heated up to the specific temperature and the annealing light source enters stable operation. The output of the photodetector 7 is transmitted on every rotation of the analyzer 61 and a computer calculates the film thickness and refractive index. The insulating film has variation owing to the annealing light and heating, so versatile information is obtained with time. |
