| 摘要 |
PURPOSE:To obtain a hard carbon coating film which possesses superior insulat ing property, transparency, hardness and stability by a method wherein a film is formed projecting on a surface of a substrate which contains at least one and more sorts of Fe, Ti, Ni, Rh, Pd, Pt and Co particle. CONSTITUTION:An ion-beam 9 of inert-gas is projected from an ion-beam source 8 to a carbon target 10 and carbon is spattered. An evapolated layer is formed by means that the surface 12 of a substrate 11 is provided so as to be almost paralel to the ion-beam 9. When a wire 13 made by Fe is stringed in the ion- beam 9 so as to be almost paralel to the substrate, Fe is spattered by the ion- beam 9, then Fe particle is irradiated on the surface 12 of the substrate while forming the film. Meanwhile, the wire 13 has the same effect on Ti, Ni, Rh, Pd, Pt and Co other than as the above-stated Fe, thus insulating property transparency, hardness, stability and diamond-like constructive property are improved by the film obtained. |
