Process for preparing chlorosilanes from silicon and hydrogen chloride using an oxygen promoter

摘要

Chlorosilanes with an enhanced hydrogen content are selectively produced in the direct reaction of silicon with hydrogen chloride at elevated temperatures by treating the silicon with a source of oxygen during the process. A process is also provided for producing selectively trichlorosilane by reacting hydrogen chloride with a fluidized bed of silicon particles and treating the silicon particles with the source of oxygen.