发明名称 MNOS memory cell without sidewalk
摘要 A non-volatile memory cell of the MNOS type, in which the sidewalk effect is avoided or at least considerably reduced by limiting the extension of the boundary layer, in which charge is stored, to a region which is smaller than the thin gate dielectric covered by the gate electrode. The gate electrode extends from the active region over a thin insulator, in which no charge storage takes place, to above the thicker field insulation.
申请公布号 US4586065(A) 申请公布日期 1986.04.29
申请号 US19830464456 申请日期 1983.02.07
申请人 U.S. PHILIPS CORPORATION 发明人 NEUKOMM, HANS R.
分类号 G11C17/00;G11C16/04;H01L21/8242;H01L21/8246;H01L21/8247;H01L27/10;H01L27/108;H01L27/112;H01L27/115;H01L29/78;H01L29/788;H01L29/792;(IPC1-7):H01L29/78;G11C11/40 主分类号 G11C17/00
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