发明名称 |
Grain-driven zone-melting of silicon films on insulating substrates |
摘要 |
A method of growing single crystal layers from polycrystal layers is taught. The method involves forming a eutectic of the polycrystal material and an alloying metal and forming a eutectic bridge between a seed single crystal and the polycrystalline material with the eutectic alloy. The alloy is kept molten and both the single crystal and polycrystal are kept solid at a temperature to induce the eutectic alloy to eat into the polycrystal and to extend the single crystal to form a single crystal layer.
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申请公布号 |
US4585493(A) |
申请公布日期 |
1986.04.29 |
申请号 |
US19840615403 |
申请日期 |
1984.06.26 |
申请人 |
GENERAL ELECTRIC COMPANY |
发明人 |
ANTHONY, THOMAS R. |
分类号 |
H01L21/20;H01L21/24;(IPC1-7):H01L21/36;H01L21/40 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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