发明名称 Grain-driven zone-melting of silicon films on insulating substrates
摘要 A method of growing single crystal layers from polycrystal layers is taught. The method involves forming a eutectic of the polycrystal material and an alloying metal and forming a eutectic bridge between a seed single crystal and the polycrystalline material with the eutectic alloy. The alloy is kept molten and both the single crystal and polycrystal are kept solid at a temperature to induce the eutectic alloy to eat into the polycrystal and to extend the single crystal to form a single crystal layer.
申请公布号 US4585493(A) 申请公布日期 1986.04.29
申请号 US19840615403 申请日期 1984.06.26
申请人 GENERAL ELECTRIC COMPANY 发明人 ANTHONY, THOMAS R.
分类号 H01L21/20;H01L21/24;(IPC1-7):H01L21/36;H01L21/40 主分类号 H01L21/20
代理机构 代理人
主权项
地址