APPARATUS FOR INSPECTING SEMICONDUCTOR APPARATUS,申请号JP19840205297-传众专利搜索

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发明名称	APPARATUS FOR INSPECTING SEMICONDUCTOR APPARATUS
摘要
申请公布号	JPS6183977(A)	申请公布日期	1986.04.28
申请号	JP19840205297	申请日期	1984.09.29
申请人	NEC CORP	发明人	HONMA MICHIO
分类号	G01R31/28	主分类号	G01R31/28
代理机构		代理人
主权项
地址

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