| 摘要 |
PURPOSE:To supply continuously an Al wire without deviating the same from a boat by supplying the high-purity or pure Al wire which is limited in diameter, tensile strength, yield strength, elongation, etc. and is controlled in hardness to the boat as Al of an evaporating source for vacuum deposition. CONSTITUTION:The high-purity or pure Al wire 4 having >=99.0% purity, 1.0-3.0mm diameter, 5-19kg/mm<2> tensile strength, 2-16kg/mm<2> yield strength and 20-1.0% elongation is continuously supplied from a reel into the boat 2 via pinch rollers 5 in the vacuum deposition method in which the Al 3 contained in the boat 2 is used as the evaporating source in a vacuum vessel. Since the various characteristics of the wire 4 are limited as mentioned above, the continuous supply of the wire 4 to the boat 2 is made possible without the generation of the wire clogging in the rollers 5 owing to the excessively low hardness and without the possibility of the deviation of the wire from the boat owing to the excessively high hardness and the consequent difficulty in the straightening of the wire. |
