| 摘要 |
PURPOSE:To obtain a positive injection head not clogged by forming a fine nozzle toward a guide groove from a planished guide-groove side end surface, stacking an upper-surface plate onto the upper surface of a nozzle plate and a substrate onto the lower surface of the nozzle plate and diffusing and joining three of the nozzle plate, the upper-surface plate and the substrate. CONSTITUTION:A nozzle plate 3 is stacked onto the upper surface of a substrate 1 so that a tank groove 2 and a tank hole 7 coincides. An upper plate 10 is superposed onto the nozzle plate 3 so that duct grooves 5 and positioning grooves 11 agree. Components are stacked in above-mentioned order, and three of the nozzle plate, the upper plate and the substrate are diffused and joined. Lastly, piezoelectric elements 12 are stuck to the positioning grooves 11 for the upper plate 10, thus forming a positive injection head. An end surface 8 on the guide groove 4 side of the nozzle plate 3 is planished, and penetrating fine nozzles 9 are shaped toward the guide grooves 4 from the end surface 8 through electrical discharge machining, etc. and the nozzle plate is washed. |
