| 摘要 |
PURPOSE:To make small the area of operating region and realize high speed operation by providing a photosensitive and heat resistant resin layer to the periphery of MESA structure, forming a shelf through provision of insulating film on such resin layer and also providing an electrode leadout portion on such shelf. CONSTITUTION:A photosensitive and heat resistant resin layer 8 is provided to the periphery of MESA structure 7. The surface of this resin layer 8 is flattened and a flat insulating film 9 is formed thereon. A shelf 10 is formed by this resin layer 8 and insulating film 9. The electrode leadout portions 13 and 14 of emitter electrode 11 and base electrode 12 are formed on this shelf 10. The wire bonding is carried out at these electrode leadout portions 13 and 14. Thereby, the electrode region on the operating regions can be narrowed. Therefore, the operating region of element can be made small, static capacitance formed on the element is as much reduced, and thereby high speed operation can be realized and manufacturing yield can also be improved. Moreover, reduction in size of operating region and flattened shelf realize integration of elements. |
