| 摘要 |
PURPOSE:To enable connecting a limited irradiation region due to each square aperture on a matter to be treated by appropriately rotating plural square apertures provided spirally moving a beam source to the radial direction of a turn table rotating a linear energy beam source the equal angle with the rotation angle of the turn table on which the matter to be treated is placed. CONSTITUTION:Irradiation ray turning means 71 which turn the irradiation rays due to a linear energy beam on a matter to be treated the equal angle with the rotation angle of a turn table 2 at the center of one point on the radial direction of the turn table 2 in accordance with the rotation of the turn table 2, beam source moving means 90 which move a linear energy beam source 6, to the radial direction of the turn table 2 and irradiation limiting means 20 provided with plural square apertures 21a-21d spirally are provided and a linear energy beam irradiation region encircled with a pair of arcs and a pair of parallel lines formed by irradiation rays is limited by the irradiation region limiting means 20. By appropriately rotating the irradiation region limiting means 20, a limited irradiation region due to each square aperture 21a-21d is connected on the matter 1 to be treated. |
