| 摘要 |
PURPOSE:To stabilize the vertical magnetic anisotropy by heat-treating the recording medium. CONSTITUTION:A photoelectromagnetic medium is manufactured, for example, by laminating an Si3N4 film 2, a Tb-Fe film 3 (composed in 25:75:5atm%), and the Si3N4 film 2 successively on a glass substrate 1 each in 1,000 Angstrom thickness by sputtering. The heat treatment of the recording medium can be carried out after a magnetic thin film is formed or after the laminated films of a protective film (SiO2, Si3N4, etc.) and a reflective film (Al, Cu, etc.) are formed. Although the heat treatment can be carried out in the atmosphere, the treatment is preferably carried out in an inert gas (N2, Ar, He, etc.) or in vacuum to control the deterioration of the characteristic due to oxidation to a minimum. Although the heat treating temp. depends on the characteristic of the magnetic thin film, the treatment is preferably conducted in the temp. range 100-500 deg.C. |
