| 摘要 |
As seen in Figure 8 islands of a buried insulating film 16 isolate mesa portions rising from semiconductor layer 13. The lateral transistor of an I<2>L device is formed in one mesa portion and a vertical transistor of the I<2>L device is formed in further, independent, mesa portions. The collector (21) of the lateral transistor is connected to the base contact region (21) of a vertical transistor part formed in an adjacent mesa portion by conductive layer 20 formed on the buried insulating film 16. Other base contact regions of the vertical transistor, in respective mesa portions, are also connected by the conductive layer 20 formed on the buried insulating film. In this way transistor regions can be limited to the minimum dimensions required for transistor action, and high speed operation can be realised. |
