发明名称 Molecular controlled structure and method of manufacturing the same.
摘要 <p>Disclosed is a molecular controlled structure which includes a plurality of normal chain hydrocarbon molecules having at one end energy responsive group such as double bonding of C=C and having at the other end reaction group which reacts the responsive group such as Si. Some of the molecules have functional group which responds to light, electron beam, X-ray, r-ray, heat, electron, or ion. The molecules are bonded in three dimensional configuration.</p>
申请公布号 EP0178606(A2) 申请公布日期 1986.04.23
申请号 EP19850112928 申请日期 1985.10.11
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 OGAWA, KAZUFUMI
分类号 G03F7/26;B05D1/18;C08J5/18;G03C1/00;G03C1/74;G03C5/00;G03F7/09;G03F7/16;G03F7/38;H01L21/027;H01L21/30;(IPC1-7):H01L29/28 主分类号 G03F7/26
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