METHOD OF PROCESS INSPECTION OF MIS-LSI ELEMENT PARAMETERS,申请号SU19833602850-传众专利搜索

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发明名称	METHOD OF PROCESS INSPECTION OF MIS-LSI ELEMENT PARAMETERS
摘要
申请公布号	SU1226363(A1)	申请公布日期	1986.04.23
申请号	SU19833602850	申请日期	1983.06.06
申请人	MO REVOLYUTSII ENERGETICHESKIJ INSTITUT	发明人	POKROVSKIJ FELIKS N,SU;EGORENKOV VLADIMIR A,SU;DEREVYANKIN VIKTOR M,SU;VYBORNYKH VYACHESLAV D,SU
分类号	G01R31/3177;G01R31/28;(IPC1-7):G01R31/28	主分类号	G01R31/3177
代理机构		代理人
主权项
地址

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