发明名称 REVOLUTION INTRODUCING DEVICE
摘要 PURPOSE:To transmit exactly high-speed revolution into a vacuum vessel in the stage of introducing the revolving motion from the outside into the vacuum vessel by attaching a hermetic sealing means and leak gas adsorbing means to a revolving shaft. CONSTITUTION:The hermetic sealing means 30 constituted with a pole piece 31, a magnet 32 and magnetic field 33 and the leak gas adsorbing means 40 using a liquefied refrigerant is attached by means of a support 52 around the shaft 20 on the vacuum side of the vessel 10. The shaft 20 and the through-hole 11 of the vessel 10 are sealed by magnetic fluid 33 by the magnetic field of the magnet 32 of the means 30 if there is the atmospheric air leaking into the vessel 10, such air is adsorbed and captured by the means 40 in which the cryogenic refrigerant such as liquid nitrogen or liquid helium is passed. The high-speed revolution is thus transmitted into the vessel 10 without decreasing the degree of vacuum therein.
申请公布号 JPS6179761(A) 申请公布日期 1986.04.23
申请号 JP19840199584 申请日期 1984.09.26
申请人 HITACHI LTD 发明人 KANAI NORIO;TERASAKI MASAO
分类号 C23C14/22;C23C14/24;C23C14/56;F16J15/43;H01L21/203 主分类号 C23C14/22
代理机构 代理人
主权项
地址