| 摘要 |
PURPOSE:To enable the analysis of a monocrystal in the depth direction thereof by measuring the lattice constant of the monocrystal with high accuracy, by converting two sets of long wavelength X-ray beams with a wavelength of 2-3Angstrom to monochromatic beams which are, in turn, allowed to irradiate the reference crystal and specimen crystal on the same rotary stand. CONSTITUTION:X-ray beams generated from an X-ray generator 1 comprising a chromium X-ray tube are limited to two directions shown by arrows 3, 4 by a slit 2 and respectively reflected by a monochrometers 5, 6. The reflected beams are allowed to irradiate the monocrystal standard specimen 2 and specimen 3 to be measured on a rotary stand and the reflected waves therefrom are measured by counters 10, 11. Because the angle width of the diffraction angle of each specimen is made narrow and the difference between the diffraction angles of the standard specimen and the specimen to be measured is measured, lattice constant can be measured with high accuracy and depth analysis having resolving powerof about 0.5mum is enabled. |
