| 摘要 |
The present invention is directed to a rotating anode x-ray source assembly which is particularly adapted for effecting high x-ray emission from a conventional x-ray source for use in replicating VLSI circuits, and comprises a rotatable anode target ring, cooling water flow channels dispose adjacent the target ring for cooling the target ring during operation, an E-beam directed to a spot on the target ring towards the periphery thereof, the cooling water flow channel being constructed and arranged so that on a transverse plane with respect to the axis of rotation all diametrically opposed points on any diameter have the same cooling water density, thereby dynamically balancing the anode under all thermal conditions.
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