| 摘要 |
PURPOSE:To take a high-precision measurement automatically by connecting a size measurement part to a scan type electron microscope body part electrically, determining an edge part showing the contour of a pattern to be measured, and storing a calibration value in the size measurement part and calculating the size. CONSTITUTION:The size measurement part 2 is connected to the scan type electron microscope body part 1 electrically, an electron beam is scanned on a measurement sample 10 where the pattern to be measured is formed, and an image signal is outputted and displayed on a display part 14. Further, a cursor setting part 19 is provided to display mutually parallel cursors 22a and 22b, and a position signal is outputted by a cursor position read part 20 on the basis of the output signal. Then, digitized image data is stored in an image signal storage part 18, the cursor position read part 20 calculates a calibration size value per measurement unit to determine plural edge parts of the pattern, and an arithmetic control part 16 calculates distances between edges. Consequently, articles are evaluated and inspected with high precision. |
