| 摘要 |
PURPOSE:To make it possible to perform highly sensitive measurement, by providing an operating means, which obtains the surface roughness of a body to be measured, based on contrast data of a contrast operating means and corresponding data of a corresponding data table. CONSTITUTION:A central processing unit (CPU)14 comprises a microprocessor and the like, operates in accordance with algorithm specified by programs in a ROM17, computes the surface roughness of a body to be measured 7 based on the data received by an A/D converter 13, displays the results on a display device 19 and records the results with a plotter 20. Based on the image data including a speckle pattern from the A/D converter 13, at first contrast is computed. In a RAM18, a data table, which shows the corresponding relation of the contrast data of the speckle pattern and the surface roughness data, is formed beforehand. Based on the data table, the surface roughness is obtained from the computed contrast data. Thus the highly sensitive measurement can be performed. |
