| 摘要 |
<p>PURPOSE:To obtain He of high purity with high rate of recovery with simple management and operation of an apparatus in a purification of gaseous He by the pressure swing adsorption process by installing a moisture absorbing apparatus at ordinary temp. and an air removing apparatus at cold temp. in combination with the above-described adsorbing apparatus. CONSTITUTION:Crude gaseous He contg. moisture or air is fed to an ordinary temp. moisture absorbing apparatus 2 compressed by a compressor 4, where the moisture is removed by either one of the two moisture absorber. One of the moisture absorbers is regenerated during the while, and the exchange of the moisture absorber is executed by the operation of valves V1-V6. Then, the gaseous He is fed to a heat exchanger 3, cooled with liquid N2 which is sent continuously. The air component is condensed and separated from the gaseous He. The gaseous He having passed through the cold temp. air removing apparatus 7 is fed to a pressure swing adsorption apparatus (PSA)8, where gaseous He having high purity is produced. On one hand, the air component adsorbed by the apparatus 8 is desorbed together with gaseous He in the desorbing stage of PSA, fed to the suction side of the compressor 4, and purified again.</p> |
