| 摘要 |
PURPOSE:To enable the easy searching of positions of a stage, a sample, and electron beams, by providing a means always indicating the present values of the sample stage in a bi-dimensional display. CONSTITUTION:The title device has two modes: the stage mode which controls display and transfer by transferring a stage 1S (X, Y) to the center position (X', Y') of a chip C and the chip mode which controls display showing the positional relation between the region CF of the chip C and the beam region F after the beam region F comes inside the chip under the condition of S (X, Y)=C (X'Y') judged from the stage position S (X, Y). The display 11 in this device, on the stage mode, indicates the positional relation between the stage position S (X, Y) within a range R of stage transfer and the chip position C (X'Y') and the sizes of the beam region and the chip. On the chip mode, the display indicates the positional and regional relation between the chip region CF and the beam region F through enlargement. |
