| 摘要 |
PURPOSE:To improve considerably the film forming speed by rotating a cylindrical photosensitive body base material, which is provided between grounded inside and outside coaxial cylinder bodies and are equally distant from these cylinder bodies, while impressing a plasma generating high frequency power to this base material. CONSTITUTION:Grounded outside and inside cylinders 11 and 12 are arranged coaxially through a top cover 23, and a reaction tank 3 is formed between them. The bottom of the outside cylinder 11 is pierced by a conductive revolving shaft 24 through an insulator 25. Between cylinders 11 and 12, shafts 29 of plural cylindrical photosensitive body base materials 29 are stood on gears 28 at equal distances from both cylinders and in parallel with the axis of the cylinder 12. Gears 28 are insulated from the outside cylinder 11 by insulators 27 and are engaged with a gear 26, and the shaft 24 is rotated by a motor omitted in the figure to revolve photosensitive body base materials around the shaft 24 while rotating them on their own axes. A plasma generating high frequency voltage is impressed across the shaft 24 and the ground by a high frequency power source 7. Gaseous Si is supplied to the reaction tank 3 from a gas bomb omitted in the figure. Thus, amorphous silicon layers are formed on photosensitive body base materials in a high speed. |
