| 摘要 |
PURPOSE:To enable the rapid discovery of specific points on a sample by a method wherein the title device has an indicating means which indicates the unit amount of stage transfer of a sample stage by means of cursor function and a control means which controls the stage transfer of the sample stage on the basis of the indicated unit amount of stage transfer. CONSTITUTION:When a screen of wiring patterns is displayed on an image display, positions shown by numerals 13 and 14 are directed by moving the cursor through control keys in a cursor control circuit 9. The distance shown by a numeral 15 is incidated as the unit amount of stage transfer, which is then fed to a computer 10. On the basis of the angles of rotation of a frame scanning coordination system, an X-Y stage 5, and the like, the unit amount of stage transfer is memoried by conversion into the actual unit amount of stage transfer observed on the X-Y stage 5. A stage control circuit 11 is provided with keys of [+X], [-X], [+X], and [-Y]: when the direction of a unit amount of stage transfer is given, the unit amount of stage transfer memoried in the computer 10 is read out, and the stage is transferred via stage drive circuit 12. |
