| 摘要 |
PURPOSE:To improve the cleanness of room air, to prevent a reduction of the effective space and to reduce the operating cost by providing a smoothing wall in the lower part of a filter installed in the upper part of the room so that the laminar flow of the clean air may be intensified and the airflow disturbance may be prevented. CONSTITUTION:An air conditioned room 20 has multiple HEPA filters 21 all across its upper part. The HEPA filter 21 have a fan in them, and by the action of the fans 23, the air in the upper chamber 22 is cleaned by the filters to be blown downward. A smoothing wall 26 which is formed in a rectangle by longer walls 24 and the shorter walls 25 is suspended from the underside of the HEPA filters 21. According to the afore-said constitution, the air in the upper chamber 22 is blown downward to a clean room 30 to form a so-called down flow to clean the interior of the clean room 30 by the action of the built-in fans in the respective HEPA filters 21. At this time, the level of cleanness is in the order of a processing section A, work section B and security section C. |
