| 摘要 |
PURPOSE:To reduce an impact when a chip contacts a circuit board by applying a speed controller which adds a load command signal and a speed feedback signal to a current controller. CONSTITUTION:A linear motor is driven at a timing T6 that the positioning of a rotary motor 15 is completed, and an attracting tool 4 is positioned at the position of P3 by the height P0. After the positioning is completed, a changeover switch 28 is switched to a terminal (b) at a timing T8, and the position loop and the speed loop are separated. Then, a load command signal beta is output from a controller 20. Since the linear motor applies a load deviation signal alphafor comparing the signal with a speed feedback signal Vf' to the next stage, the tool 4 is controlled at the speed to the position of the height P6. When the tool 4 arrives at the position of P6, the tool 4 contacts a circuit board. Thus, the signal beta becomes a current command signal. At this time, the signal betais controlled in response to a current feedback signal If, and applied to the desired load. |
