发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To improve cooling efficiency of a semiconductor device by surrounding a semiconductor chip with gel such as silicon rubber, etc. mixing powder of substance having a high thermal conductivity. CONSTITUTION:A semiconductor chip 1 is loaded on a package substrate 3 through an exploded electrode 2 of the flip-chip type and a dam 4 is provided at the predetermined position of the package substrate 3. This dam 4 is filled with gel 6 such as silicon rubber mixing powder 5 of substance having a high thermal conductivity in such a manner as surrounding the semiconductor chip 1 and the package 3 is sealed with a cap 7 using a bonding agent 8 such as a low melting point glass. As a powder of substance having high thermal conductivity to be mixed with gel 4, for example, a silicon carbide containing a little amount of beryllium is used. Thereby, the heat generated in the semiconductor chip 1 can be transmitted to the package substrate 3 and radiated therefrom through not only an exploded electrode 2 but also gel 6 mixing powder 5 of a substance having a high thermal conductivity. Accordingly, the cooling efficiency of semiconductor chip 1 can be improved.
申请公布号 JPS6175550(A) 申请公布日期 1986.04.17
申请号 JP19840196659 申请日期 1984.09.21
申请人 HITACHI LTD 发明人 ITO KAZUO;ENOMOTO MINORU
分类号 H01L23/373;H01L23/31;H01L23/42 主分类号 H01L23/373
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