| 摘要 |
PURPOSE:To make it possible to perform high speed recording with high recording density by reducing the deformation of an insulating substrate by the heat of the surface of said substrate, by providing a layer comprising a substance with negative expansion coefficient between the insulating substrate and a heat generating resistor. CONSTITUTION:A layer 5 comprising a substance with negative expansion coefficient is formed to the region forming a heat generating resistor 1 and the region locally rising in temp. at the time of use on an insulating substrate 2 of which the single surface is covered with a glass glaze layer 7. Further, a layer comprising Ta2O5 or Al2O3 is formed to the entire surface of the substrate as an etching resistant layer 6, and the heat generating resistor 1 and an electrode 3 are formed thereon before a protective layer 4 is formed. The coefficient of linear expansion of the layer 5 comprising the substance with negative expansion coefficient is selected so as to take a proper value according to a composition and the thickness thereof is properly set to bring the etching resistant layer to a degree capable of almost disregarding surface deformation thereof. Therefore, radiant heat becomes well because the layer 5 comprising the substance with negative expansion coefficient directly under the heat generating resistor 1 is a metal and higher speed printing is enabled by this effect. |
