Optical monitor for direct thickness control of transparent films

摘要

Precise thickness control for high performance optical coatings is provided in an optical coating system utilizing an optical monitor. The optical monitor utilizes a light source and detecting arrangement that measures a sample optical element through the expedient of a light path altering structure that is not coincident with the axis of rotation of a deposition carrousel structure that supports optical elements being coated. The light source and detector arrangements can be mounted conveniently outside of the vacuum chamber of the optical coating system.