| 摘要 |
PURPOSE:To obtain a lightweight, compact sensor which is hardly affected by a noise by arranging a probe in opposition to a light guide formed on a substrate, and detecting scattered light from the light guide. CONSTITUTION:The substrate 2 is fitted to an oscillation body together with a light emitting elemenet 12, cable 14, and power source 16. In this case, the light guide direction of the light guide 4 formed on the substrate 1 is made coincident with the oscillation direction (arrow A) of the oscillation body. Then when light emitted by a light source 12 is made incident, the light is scattered by the light guide 4. This scattered light is detected by the probe 6 and guided to a measurement system through an optical fiber 8. Then, the substrate 4 moves to and away from the probe 6 as shown by an arrow A according to the oscillation of the osciallation body, but when its movement extent is within a range shown by B, the quantity of scattered light converged on the probe 6 varies linearly. Therefore, the amplitude of the oscillation body is detected with high precision within this range and the oscillation frequency of the oscillation body is detected from the speed of variation in the quantity of light. |
