| 摘要 |
PURPOSE:To clean the interior of a film-forming vacuum tank, by allowing the vacuum tank to be connected to and disconnected form external equipment as desired, permitting the vacuum tank and external equipment including an evacuating system to move relative to each other, and providing a washing device for dipping the vacuum tank into a washing liquid. CONSTITUTION:Each of the film-forming tanks 1 is automatically or manually moved along, for example, rail 10 by means of the driving force derived from a motor or the like. Connecting ports 11, 12 for external equipment such as a gas supply system, an evacuating system and an electricity supply system are respectively provided at predetermined positions along the path of movement of the vacuum tank 1. The vacuum tank 1 is provided with connecting ports 2, 3 which allow the tank 1 to be detachably connected to from any of the external equipment. These connecting ports 11, 12, 2, 3 are formed such as to have the same configurations at each of the positions (a), (b) and (c) so that the connecting ports 2, 3 of the vacuum tank 1 can be mutually connected to the connecting ports 11, 12 of the external equipment at any of the above-described positions. After the completion of formation of a thin film, the vacuum tank 1 is moved to a washing tank 6 and dipped into a washing liquid 5 contained in the tank 6 so as to be washed. |
