| 摘要 |
PURPOSE:To facilitate wafer travel with a simple construction, by installing a free-to-roate hand-arm around a shaft positioned on one end and a wafer- supporting finger connected for the same freedom of rotation around the after end of a different shaft. CONSTITUTION:A handler for wafer travel is composed of hand-arm 10 free-to- rotate around a shaft 10 positioned on one end 9, hand-arm 12 free to rotate through a shaft 11 on the other end of the arm 10 and finger 5 for supporting a wafer connected also free to rotate like a pivot on the other end of the hand- arm 12. In this handler, the hand-arm 12 rotates around the shaft 11 in the direction in which it is separated from the shown position apart from a wafer cassette 6. Further, finally, the finger 5 is so positioned as piled up above the hand-arms 10, 12. Thus, as compared with the conventional handlers, length of the hand-arm can sufficiently be as short as 1/4 of the specified travelling distance, realizing a significant saving of space. |
