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发明名称
ELLIPSOMETER VOM TYP EINES DREHANALYSATORS.
摘要
申请公布号
DE165771(T1)
申请公布日期
1986.04.10
申请号
DE19850304198T
申请日期
1985.06.12
申请人
VICTOR COMPANY OF JAPAN, LTD., YOKOHAMA, KANAGAWA, JP
发明人
ITONAGA, MAKOTO, YOKOHAMA-SHI KANAGAWA-KEN, JP;KAYANUMA, KANJI, HATANO-SHI KANAGAWA-KEN, JP
分类号
G01N21/21;(IPC1-7):G01N21/21;G01B11/06
主分类号
G01N21/21
代理机构
代理人
主权项
地址
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