| 摘要 |
PURPOSE:To prevent the adhesion of foreign matters to a transferred base plate to be processed and to suppress the deterioration of quality to be processed by providing a mechanical means by the transfer of which the base plate from an external part to a main vacuum chamber is executed with a vertical position against the surface to be processed. CONSTITUTION:In the first transfer means 40 by which the base plate 30 is transferred between the external part and a preliminary vacuum chamber 20, grooves 43, 44 are formed on the upper surface, corresponding to gate valves 72, 73 of pushers 41, 42 and the base plate 30 is held at the vertical position against the specified surface to be driven vertically. The second transfer means 50, is formed by roller conveyers 51-53, a guide roller 54, base plate carriers 55, 56 or the like. The base plate 30 is disposed on the base plate carriers 55, 56 to be rotated in a carrier buffer chamber 21. The third carrier means 60 has an arm 61 and base plate holding stands 62, 63, and claws 64, 65 of the base plate holding stand 62, 63 deliver and receive the base plate 30 between the carriers 55, 56. The base plate 30 is delivered to a base plate setting means 80 in the main vacuum chamber 10 at while holding the vertical position against the processed surface as it is.
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