| 摘要 |
PURPOSE:To form a protection film continuously, stably with good repro ducibility without damaging a base by evaporating a target composed of an organic high polymer in vacuum with irradiation of laser beams and depositing it on the surface of the base to be protected. CONSTITUTION:A target 5 composed of an organic high polymer of an evaporation depositing source, installed in a vacuum drum 4 with an evacuation system 6 is irradiated by a laser beam, which is generated from a laser beam source 1 through a synthetic quartz lens 2 and a synthetic quartz window 3 and evaporated and spattered in the vacuum. Accordingly, a magnetic recording tape 7 is transferred continuously by rolls 8, 9 as a base, and an evaporated material of the organic high polymer spattered on the surface is deposited to form a protection film. To form the protection film, a CO2 laser beam of 1-10<-6>Pa at the degree of vacuum in the vacuum drum 4, of >=0.5J/cm<2> and 150-400nm in the wavelength of the laser beam is suitable. |
