发明名称 WIRE-BONDING DEVICE
摘要 PURPOSE:To enable to perform a favorable wire-bonding by a method wherein the recognizing unit is designed in such a way as to be able to move in the X and Y directions from the reference visual field position. CONSTITUTION:The origin 8-0, of a first target objective 6-1 and the visual field reference position 9-0 of a second recognition objective 6-2 are respectively set to a pellet 1 at the reference position. The position of the pellet 1 deviates and the pellet 1 is assumed a pellet 1'. For metering the deviation amount, firstly, the identifying unit is made to step toward the reference position 8-0 for confirming a first objective 6-1', yet as the 6'-1 does not come in sight, the recognizing unit is made to move toward the 8-0 8-1 8-2 8-3 8-4 according to a set moving method. The first target 6'-1 becomes recognizable in the visual field at the position of the 8-4. After the first objective 6'-1 is recognized, the identifying unit is made to shift the visual field for identifying the following objective 6'-2 yet the identifying unit is made to shift to a visual field at a new reference position 10, which is corrected as much as the deviation amounts DELTAx and DELTAy to the X and Y directions from the reference position 6-1. By this way, the following objective 6'-2 becomes recognizable without fail at the first visual field position. As a result, the need to shift the visual field in order is eliminated and the shortening of the total identifying time can be contrived.
申请公布号 JPS6169142(A) 申请公布日期 1986.04.09
申请号 JP19850134041 申请日期 1985.06.21
申请人 HITACHI LTD 发明人 TAKASUGI NOBUHIRO;KYOMASU RYUICHI
分类号 H01L21/60 主分类号 H01L21/60
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