APPARATUS FOR PRODUCING SINGLE CRYSTAL

摘要

PURPOSE:To improve the reliability in temp. measurement by a thermocouple and to obtain a single crystal having uniform characteristics by providing a stable material having good heat conductivity and heat resistance between a crucible and heater and embedding the top end of the thermocouple into the stable material. CONSTITUTION:There are a raw material melt 4 and a liquid capsule 5 for sealing the melt in the crucible 3. A single crystal 1 is successively pulled up in succession to a seed crystal 2 from the melt 4. An upper shaft 6 ascends while rotating and a lower shaft 7 supports the crucible 3 from below. The thermocouple 11 at the crucible bottom is attached between the crucible 3 and the shaft 7 and the top end of the thermocouple 11 is embedded in the stable material 14. A heat insulating material is provided on the outside circumference of the heater 8. The material 14 consisting essentially of a material having good heat conductivity and adjusted in the heat conductivity in each part by spacers, etc. is provided between the crucible 3 and the heater 8 so that the direct transmission of the heat radiated from the heater 8 to the crucible 3 is prohibited. The stable material 14 is made of substance having the good heat conductivity and heat resistance.