发明名称
摘要 PURPOSE:To secure an accurate positioning by giving no matching action immediately after the pre-exposure but giving a command for the matching action after confirming that the position detecting state has been giving based on the sudden change of the illumination light.
申请公布号 JPS6112372(B2) 申请公布日期 1986.04.08
申请号 JP19770102686 申请日期 1977.08.29
申请人 HITACHI LTD 发明人 YABUHARA YOJI
分类号 H01L21/30;G03F9/00;H01L21/027;H01L21/68 主分类号 H01L21/30
代理机构 代理人
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