| 摘要 |
PURPOSE:To cool forcibly a pulled-up single crystal and to permit the continuation of the pulling up of the single crystal by providing a cooled cylinder around the single crystal pulled up from the melt in a crucible. CONSTITUTION:The water-cooled cylinder 22 extending downward above the liquid surface of the melt 3 is provided to the inside wall in the central part of a water cooling jacket 8b to enclose a pull-up shaft 17, the single crystal 20, etc. The cylinder has the inside diameter slightly larger than the diameter of the crystal 20 and the central axis thereof is in alighnment with the central axes of the shaft 17 and the crystal 20. A curved plate 23 and a heat shielding body 24 are attached thereto. since the cylinder 22 is provided around the crystal 20, the force cooling of the crystal 20 is made possible by such cylinder 22 and the heat radiated from the crucibles 1, 2 heating element 4, etc. is shielded by the cylinder 22. As a result the crystal 20 is prevented from being heated by the radiation heat. |
