| 摘要 |
A thin film gas sensor for the detection and measurement of gaseous hydrocarbon contaminants having double and triple bonds in air by means of semiconductive tungsten oxide. The invention also relates to a method for manufacturing such a thin film gas sensor. The substrate for the tungsten oxide thin film consists of a lithium niobate monocrystal preferably oriented in the (001) direction. The gas sensor responds very sensitively to acetylene, responds less sensitively to hydrocarbons having double bonds, and exhibits practically no response to saturated hydrocarbons.
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