| 摘要 |
PURPOSE:To facilitate the high-accuracy regulation of a resistance value and to level the surface by arranging resistance elements and a superconductive member for connecting those elements in the same layer and unifying them in the superconductive circuit device which operates based on a superconductive phenominon by use of a superconductive material. CONSTITUTION:An Si substrate 11 is coated with an SiO2 insulating layer 12 and further on that, a ground plane layer 13 consisting of Nb and an insulating layer 14 composed of Nb2O5 and SiO are laminated and base electrodes 15 of Nb are coated on that. Nextly the substrate except a selective region 16 in the center is covered with a photoresist film and <14>Na<+> ions are implanted into the region 6 to produce damages. And a superconductive dislocation temperature of said damages decreased to under 4.2 deg.K to make the damages resistance elements and a dislocation temperature of the base electrode 15 surrounding the region 6 is kept at about 9 deg.K. After that, the whole surface is covered with an SiO insulating layer 17 and tunnel barriers 18 are opened in the positions on the electrodes 15 in a state of 9 deg.K and the Nb opposite electrodes 19a and 19b are attached to said barriers 18. Thus a resistance value is regulated and the region 16 connects the electrodes 19a and 19b to reduce a contact resistance. |
