| 摘要 |
PURPOSE:To contrive the improvement of the yield in the mounting process of a semiconductor pellet and the simplification of the structure of the titled device, and to enable to improve the productivity of the device by a method wherein the positioning regions of the inner leads on the side of the pellet and the electrodes on the external substrate are sectioned on the left and right and plural sets of cameras, by which the positioning regions are picked up, are provided. CONSTITUTION:The positioning regions of inner leads 2 on the side of a pellet 1 on the semiconductor pellet mounter and outer leads 3 on an external substrate 4 on the mounter are sectioned on the left and right and two sets of cameras 7, by which the positioning regions are discretely picked up, are set up over the upper direction of the pellet 1. A monitor 8 is connected to the cameras 7 through a camera control unit 9 and a separator 12 on the output side of the cameras 7 and the state of the inner leads 2 and the outer leads 3 is monitored by this monitor 8. Then, the positioning of the inner leads 2 and the outer leads 3 is performed by the joy sticks 10 of the monitor 8, the information on the result positioned is read in a controller 11, the correction amount of the position of the pellet 1 is calculated and the X, Y and theta stages are automatically adjusted. By this way, the yield in the mounting process is improved by a single constitution. |
