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发明名称
摘要
申请公布号	JPS6152270(U)	申请公布日期	1986.04.08
申请号	JP19840137311U	申请日期	1984.09.11
申请人		发明人
分类号	G01R31/26;G01R1/067;H01L21/66;(IPC1-7):G01R1/067	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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