RIGID MATERIAL CONSISTING OF TITANIUM, BORON AND NITROGEN

摘要

PURPOSE:To obtain the rigid material high in hardness and electrically- conductive properties by containing Ti, B and N in proper quantity and specifying the X rays diffraction peak. CONSTITUTION:The rigid material which contains about 60-80wt% Ti, about 1-31wt% B plus about 1-25wt% N and is obtained by the chemical gaseous phase deposition or the like has the diffraction peak within the range of (42.6 deg.-44.5 deg.) for 2theta by means of X rays diffraction measurement due to CuK alpharays. When using the rigid material as an ultrarigid coating film, the coating can be performed for a short period. The material has excellent electrically- conductive properties and its bulk body is useful for a high-temp. corrosion resistant heater, an electrode material and the contact material, etc. Also the material can be used as a sintered body by crushing it. The rigid material can be manufactured in high deposition rate even at the high temp. of about >=1,600 deg.C.